Organic EL film formation device
Film-forming device for organic material development
**Features** - Capable of transporting masks and samples using a transport mechanism. - Organic and metal materials can be deposited in the same chamber. - Co-evaporation of organic and metal materials is possible. - Co-evaporation of organic materials is possible (up to 4 components). - Standard water-cooled jacket to prevent contamination between organic and metal materials. - In the deposition chamber, substrates and masks can be exchanged under vacuum conditions. - The gap between the substrate and the mask is minimized. - The substrate rotation mechanism ensures film thickness uniformity within ±5% across the surface. - The organic deposition cell has excellent directionality, resulting in minimal material contamination in the deposition chamber. - Each processing chamber is treated with a special surface treatment for rapid attainment of the operating vacuum pressure. - Can be connected to a glove box. - Automatic transport and exhaust are possible with PLC control. - The introduction chamber can stock a standard of 5 substrate and mask holders.
- Company：北野精機
- Price：Other
